Design based inspection methodology and application in the fab

As the design rule shrinks, detecting smaller key defects of interest is becoming more challenging for wafer inspection tools. A novel Knight™ Design Based Inspection (KDBI™) system was implemented to extend Applied Materials' inspection tools' capability. Using design data, the KDBI™ Recipe Editor helps to expedite the recipe creation process. A CAD database makes it easy to find the array areas automatically. Other region-of-interest (ROI) CAD information can be provided for KDBI™ to convert into inspection tool recipes with different detection sensitivity controls on different ROIs. Most of the die layout process during recipe setup is done off-line, saving in-line inspection tool time.