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High-Speed Tracking of a Nanopositioning Stage Using Modified Repetitive Control | IEEE Journals & Magazine | IEEE Xplore

High-Speed Tracking of a Nanopositioning Stage Using Modified Repetitive Control


Abstract:

In this paper, a modified repetitive control (MRC) based approach is developed for high-speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is de...Show More

Abstract:

In this paper, a modified repetitive control (MRC) based approach is developed for high-speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed as a periodic disturbance over a linear system. Then, the MRC technique is utilized to account for the periodic disturbances/errors caused by the hysteresis and dynamics behaviors. The developed approach provides a simple and effective hysteresis compensation strategy, avoiding the constructions of hysteresis model and its inversion. Besides, with improved loop-shaping properties, the MRC can alleviate the nonperiodic disturbance amplification problem of the conventional repetitive control. Finally, the effectiveness and performance of the developed MRC-based approach are verified by the experimental results on a custom-built piezo-actuated stage in terms of hysteresis compensation, disturbance rejection and tracking accuracy.
Published in: IEEE Transactions on Automation Science and Engineering ( Volume: 14, Issue: 3, July 2017)
Page(s): 1467 - 1477
Date of Publication: 22 May 2015

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