Comparitive analysis of capacitive type MEMS pressure sensor for altitude sensing

This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are discussed. Also a new design is proposed to overcome the demerits of capacitive sensor.