Characterization of nano-coated micro- and nanostructures by pushing

In this paper, we present methodology for measuring mechanical properties of nano-coated micro- and nanostructures by pushing. The methods are demonstrated in four applications: interfacial mechanical properties of atomic layer deposited (ALD) thin films, strength of ALD-coated microfibers, adhesion and mechanical properties of thin films, and adhesion between microparts. The measured properties include adhesion between particles and thin films, adhesion between thin films and substrates, strength of fibers, Young's moduli and residual stresses of thin films, fracture strength of thin films, and wet adhesion between microparts. We show that these properties can be obtained by measuring lateral and normal forces when pushing objects, and discuss how similar methodology can be used in other applications, such as membrane and cell characterization.