Millimeterwave micro-coax development using simplified 3D fabrication process

This paper presents the development of 3D millimeter-wave half-coax devices through a simplified 3 mask layer monolithic wafer-level micro-fabrication process. As the result of this fabrication technology, a whole variety of on-wafer RF MEMS devices including 2D and 3D structures can be fabricated and integrated on a single die.