Fabrication of a three dimensional cantilevered vibrational energy harvester using silver ink

A novel 3D micro electromagnetic energy harvester capturing mechanical vibrational energy from environmental activities is proposed. The harvester is built on a cantilever microstructure, on which 3D coils locate. The energy harvester is aimed to generate power in the relative low frequency range, which is below 500 Hz. By injecting multi-layer of spiral coils on a cantilever structure, the resonant frequency can be reduced and the output voltage and power can be increased.