A graphene accelerometer

This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3–10 µm and the proof mass diameter being 1–5 µm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ∼1000–3000 g.