Planar waveguide based structures for integrated optics on PDMS

In this paper, the fabrication technology for planar waveguide structures and devices in polydimethylsiloxane (PDMS) is presented. Direct laser writing was used to prepare pattern master in photoresist layer. In the next step, channel waveguide and ring resonator structures were imprinted in PDMS material. Finally, morphological properties of prepared waveguide structures were investigated by atomic force microscopy.