Electro-mechanical properties of a micromachined varactor with a wide tuning range [for VCO]

This paper discusses the electro-mechanical properties of a new micromachined varactor structure that can achieve a wide tuning range. An experimental device was fabricated in a polysilicon surface micromachining process. The varactor achieves a tuning range of 40 percent and a quality factor of 9.75 at 1 GHz when the capacitance is set to 3.62 pF.