Low Phase Noise Oscillator at 60 GHz Stabilized by a Substrate Integrated Cavity Resonator in LTCC

In this letter, we report a low phase noise oscillator exhibiting state-of-the-art phase noise characteristics at 60 GHz. The oscillator is stabilized by an off-chip substrate integrated waveguide (SIW) cavity resonator, manufactured in LTCC technology. The area on top of the cavity resonator is used to flip-chip mount the MMIC, realized in SiGe technology. Measured oscillators discussed in this paper operate at frequencies of 59.91, 59.97, and 59.98 GHz. The measured phase noise at 1 MHz offset is -115.76 dBc/Hz, -115.92 dBc/Hz and -116.41 dBc/Hz, respectively. To our knowledge, the present hybrid oscillator has the lowest phase noise and highest figure of merit of integrated oscillators at V-band. The simulations are in very good agreement with the measured oscillation frequencies.