Study of response time of a micro flow sensor

In this paper, simulation model for the response time of micro flow sensor using COMSOL Multiphysics is presented. The detailed structure of the micro flow sensor chip is considered in the simulation model. What's more, the temperature dependencies of physical properties of air are defined to improve the model precision. The model takes into consideration the transient conduction and convection between the sensor structure and fluid region. The effects of mass flow rate, thermistor position, input power and depth of flow channel on the response time of the micro flow sensor are investigated in detail. The effect of air relative humidity on the response time of the micro flow sensor is also studied. The results show the geometry parameters are the main factors that affect the response time.