Electrical simulation of thin film inductors on silicon and glass substrates

Passive devices are widely used in all kinds of systems. Generally, most of the passive components in an electronic system are assembled as discrete components or passive arrays. Bu t a discrete passive component occupies a lot of space for the realization of its function. To overcome this shortcoming, one promising way is the integration of passive components into system in package. In this paper, we designed two kinds of thin film spiral inductors on both silicon and glass substrates. One is monolayer structure and, another has double layers. The inductors we re modeled and simulated using Finite Element Method (FEM). And, the electrical analysis was performed by ANSYS HFSS an dQ3D.