Fabrication of piezoelectric zinc oxide nanorods by Electrospraying method

This study mainly used Electrospraying and Taguchi method to investigate the optimum process of piezoelectric Zinc oxide (ZnO) nanorods parameters. Zinc oxide seed layer was electrosprayed on Au/Chromium/Silicon substrates. The electric field is around 660 V/mm. In this study, ZnO was made in an array to characterize. We used X-ray diffraction (XRD), photoluminescence (PL) and field emission scanning electron microscopy (FE-SEM) to characterize the morphology and luminescence of ZnO nanorods. The result showed that with higher and longer of annealing temperature and time. Furthermore, this study was obtained optimum height at 3~5 um of piezoelectric Zinc Oxide nanorods by adopting the process of hydrothermal for 14 hours and with 90 degrees Celsius.