Passive MEMS antenna structures for an hybrid UHF/UWB RFID tag

A conductive passive structure for miniature RFID tags is manufactured with a europractice MetalMUMPS technology. The antennas are co-located with a micro mechanical temperature sensor manufactured on the same silicon chip. The envisioned application of this RFID tag is monitoring of the cooling chain for transport logistics. The necessary design steps for the UHF/UWB On-Chip Antennas are described in detail. The manufactured prototypes are measured with a network analyser and presented in this paper.