Technology and applications of micromachined membrane deformable mirrors

We report on technology and applications of micromachined membrane deformable mirrors (MMDM). The MMDM is formed by a thin flexible membrane, coated with a reflective material and stretched over the electrostatic actuator structure. The membrane can be locally deflected by applying voltages to the electrostatic actuators, these local deflections can be superimposed to form the necessary optical figure.