Study on generation mechanism and stability analysis for air hammer of air-bearing slider

Air-bearing slider is an important component of precision and ultra-precision motion equipment and is expected to be used in robots. Its bearing capacity, stiffness and stability determine the motion precision of the equipment. However, air hammer is an instability phenomenon of aerostatic air-bearing slider. The vibration caused by air hammer's self-excitation will affect the motion precision, and even break the closed-loop control of the system. Therefore, it is necessary to analyze the air hammer's self-excitation of the air-bearing slider. In this paper, the generation mechanism of the air hammer was analyzed, basing on this, we proposed the stability discriminant and preventive methods.