An analysis of frequency temperature characteristics of a Lamb wave type quartz acoustic wave device

This paper describes frequency temperature characteristics of a Lamb wave quartz resonator analyzed under the boundary conditions of a thin film formed on each of two side surfaces of a quartz substrate using an equation of motion and a Laplace equation. In detail, the frequency temperature characteristics are analyzed by taking a thickness and a cutting angle of the quartz substrate as a parameter. As a result, the first and second order temperature coefficients α and β of the Lamb wave quartz resonator become substantially zero at an Euler angle (0 °, 37.825 °, 0 °), a normalized quartz substrate thickness H / λ = 1.00 ∼ 1.30 and a phase velocity 5500 m/sec ∼ 6000 m/sec. Based on the results of this analysis, a Lamb wave quartz resonator is manufactured, and electrical characteristics and frequency temperature characteristics of the resonator are evaluated.