On-Wafer Noise Measurement at 300 GHz Using UTC-PD as Noise Source

We demonstrate on-wafer noise measurement based on the Y-factor technique at 300 GHz utilizing a uni-traveling-carrier photodiode (UTC-PD) as a noise source. Since the UTC-PD can provide high and scalable noise power for the hot state and has a waveguide output port, easy and reliable measurement is available even at terahertz frequencies, where the loss from the experiment setup is not ignorable. We describe the experimental procedure with the UTC-PD as a noise source and a diode mixer as a noise receiver and present a noise figure measurement for a 300 GHz amplifier MMIC in an on-wafer environment. In addition, we discuss the uncertainty due to using the UTC-PD.