Design and investigation of SiO2 slab waveguide grating for photonics sensing application

We report design and investigation of PECVD SiO2:N/SiO2 slab waveguide grating with a width modulation for sensing application at 1550 nm spectral range. The fundamental parameters of reflected spectrum by grating is simulated and investigated as a function of temperature, cover refractive index and strain. The apodization of designed slab waveguide grating is possible to be realized in one technological step.