Double-Layer 90° corrugated terahertz horn antenna based on MEMS technology

A double-layer 90° corrugated terahertz (THz) horn antenna based on MEMS (Micro-electromechanical System) technology is proposed. This antenna is designed at the frequency range of 400GHz–500GHz. Through adding expansion aperture and chokes to the traditional structure, good antenna performance can be obtained. From the simulated result it shows a impedance bandwidth of 400–500GHz with input return loss less than 10dB. The radiation pattern shows good symmetric beamwidth and very low cross-polarization. The peak gain varies from 13.9dBi to 16.1dBi within the frequency band 400GHz–500GHz. Dry etching MEMS technology is suitable for design of this type of antenna.