A simple scheme for implementing wave absorption in quasi-neutral simulations of ECR plasmas

Summary form only given. The NRL program in modeling of high density plasma processing reactors is currently focusing on the ECR reactor. This is characterized by a long mean free path for both electrons and ions, but where self electrostatic fields also play an important role. However since plasma frequency time scales and Debye length scales are very short compared to other times and lengths of interest, neither a fluid formulation nor a full particle simulation are the optimum modeling tool. Accordingly the modeling effort has focused on the development of a quasi-neutral particle simulation technique. The one thing not modelled up to now is the power deposition in the plasma from the incident wave. This paper develops a scheme for modeling wave absorption.