Fabrication and experimental demonstration of a multichannel module for intra-MCM optical interconnects

Summary form only given. We use deep proton irradiation of poly(methyl methacrylate) (PMMA) as a deep-etch lithographic technique that allows us to fabricate monolithic structures integrating refractive microlenses, micromirrors, fiber positioning holes, standoffs, and alignment features. The technique works as follows: a proton beam in the energy range between 5 and 10 MeV, passing through a metal mask, impinges on a high-molecular-weight PMMA substrate.