A study on reliability of chip scale packages in shock environments

The paper reports compare of reliability between the chip scale package in MEMS devices with internal support structures and those without internal support structures in shock environments. We choose two kinds of chip scale packages of MEMS devices that meet requirements of analysis and experimental. By means of experiments, we obtained two kinds of chip scale packages structural parameters. And we establish structural model by ANSYS. The FEM (Finite Element Method) simulation and experimental test on both kinds of chip scale packages were performed. The improvement of shock resistance of chip scale package with internal support structures is demonstrated according to our results.