A new approach for accurate electrostatic Green's function computation in planar layered media based on higher-order finite element method

Summary form only given. The electric performance verification of high-speed interconnects in the current and emerging integrated circuit technologies requires accurate extraction of capacitance matrices. This is accomplished via solving the pertinent electrostatic boundary value problem expressed by the linear integral equation of first kind. In case of interconnects embedded in planar layered media the unknowns are both the electric charge density on the conductor surface and the polarization charges at the dielectric interfaces. In order to substantially reduce the corresponding discrete problem size the unknown is restricted to the conductor surface via formulating and computing the electrostatic Green's function which accounts for the boundary conditions present at the interfaces of the planar layered media.