A microelectromechanically reconfigurable mesh filter for high-performance terahertz modulation

We present and experimentally demonstrate a terahertz intensity modulator, which offers more than 70% modulation depth over a 1.5 THz frequency band, under a modulation voltage of 30 V and modulation speeds exceeding 20 KHz. The achieved modulation depth is the highest reported among previously demonstrated terahertz intensity modulators, in general, and 5 times higher than the demonstrated broadband terahertz modulators with similar modulation voltages and modulation speeds, specifically.