New calibration method for experimental study of nonlinear behavior of Bulk Acoustic Wave resonator with power

This paper deals with experimental studies of nonlinear behavior of Bulk Acoustic Wave (BAW) devices, in a Solidly Mounted Resonator (SMR) structure. The purpose is to extend the Modified Butterworth Van Dyke model to a complete non-linear model of a BAW resonator, which takes into account all nonlinear effects. Frequency shifts were studied when high Radio Frequency (RF) power (up to 5W) is applied to the resonators. We have focused on the W-CDMA frequency standards, for resonators of emission filters of a front-end module in mobile phones. To stabilize the input power, we have developed a new calibration method, which is able to match the data correction between a high and small signal at any frequencies. With this method, we have access to the power waves, and we recalculate the S-parameters externally as a function of the frequency sweep.