Characterization of a GaN Lamb-Wave Sensor for Liquid-Based Mass Sensing Applications

Lamb-wave acoustic devices have been proposed as a promising platform for sensing applications. In this paper, the performance of a GaN Lamb wave device as a liquid-based mass sensor is studied with respect to the effect of environmental parameters to the device performance, namely, the liquid flow-rate, device temperature, and presence of a thin gold film deposited on the GaN membrane.