Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials

In this paper, a nanorobotic system containing a custom-made nanohandling robot, atomic force microscope, scanning electron microscope and focused ion beam is presented. The nanorobotic atomic force microscope system facilitates the analysis of nanostructured surfaces as well as the handling of nanoobjects. Furthermore, a gas injection system is available that enables particle beam-based structuring and deposition of nanomaterials. This combination provides an enabling technology for the hybrid processing, manipulation and characterization of nanomaterials.