Relaxation Analysis of Two Hinged Ends Micro-plate Based on Euler-Bernoulli Equation

In order to explore relaxation characteristic of micro-plate in MEMS, the deflection relaxation expression of micro-plate with two hinged ends was educed Based on Euler-Bernoulli equation. The deflection relaxation process of micro-plate under over-damping, critical-damping and under-damping was calculated used Maple. The relaxation simulation data of micro-plate with different length-width ratio used ANSYS conformed to theoretical calculation Based on Euler-Bernoulli equation and the relaxation time decrease significantly with the increase of width under over damping and critical damping relaxation simulation.