PPPS-2013: Intense atmospheric pressure plasma array for plasma polymerization

Summary form only given. Two atmospheric pressure plasma devices were fabricated with the purpose of creating plasma emissions with a greater intensity, and their potential in atmospheric pressure plasma polymerization was investigated. Both devices were arrays consisting of a central glass tube surrounded by several smaller glass tubes. Jet-to-jet coupling created a single plasma plume originating from the central tube when the devices were operated in the intense plasma mode. The intense plasma mode with all glass tubes generating plasma was compared to the single jet mode in which the same devices were operated but only the central glass tube contained plasma. It was determined that the intense plasma mode produced plasma with greater optical intensity due to more charge particles being present; however, the increase in power consumption compared to the single jet mode was negligible. This effect of increasing optical intensity during the intense plasma mode was found to be more pronounced with a greater number of tubes surrounding the central one, despite smaller tube size. A polymer deposition system using the aforementioned plasma array was developed, which enables charged particles and energetic species to be generated near the substrate. Argon was employed as the discharge gas for plasma generation and its flow rate was in the range of 2-3 slm. Methylmethacrylate (MMA) monomer was vaporized by means of a glass bubbler which was supplied argon gas with flow rates in the range of 100-400 sccm at room temperature. The resultant plasma-polymerized PMMA thin films were transparent, thin, and strong when deposited on metal, glass, and plastic substrates. This polymer deposition system combines the inexpensive elements of atmospheric pressure plasmas, film quality approaching that of vacuum plasmas, and the ability to deposit materials on temperature sensitive substrates.