Miniature Fourier transform infrared spectrometer for middle infrared wavelength range

A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm²), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO₂ and water has been demonstrated using this miniaturized FTIR.