Reliability enhancement test of vertical voice-coil motor on wafer stage of lithography machine

Voice-coil motor has a lot of advantages such as small volume and light weight, high speed, high acceleration and rapid response, hence it is used to drive wafer and reticle stages of lithography machine to accomplish precise motion. The influence of internal cooling on motor's motion accuracy is directly related to the performance and reliability of lithography machine. This paper aims to provide a basis for reliability growth by design of reliability enhancement test for vertical voice-coil motor on wafer stage, with which the researchers can stimulate potential failure and expose design defects.