Gallium arsenide based micro-accelerometers

Gallium arsenide (GaAs) based micro-accelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The micro-accelerometer is a microelectromechanical system (MEMS) micromachined on top of a GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.