A MEMS-based oscillator with synchronous amplitude control

This paper describes the design and simulation of a MEMS-based oscillator with a silicon tuning fork as frequency selective element. The interface electronics include a synchronous amplitude control circuit that allows for precise control of oscillation amplitude. The nominal oscillation frequency is 1.8 MHz. The structure has been implemented using a 0.35 μm High Voltage CMOS process and operates with a nominal supply of 3.3V.