Annular shutter mirror for a digital video disk pick-up module

This paper describes design and fabrication of micromachined annular shutter mirror (ASM) for use as an adjusting means of the numerical aperture (NA) in a digital video (or versatile) disk (DVD) pick-up module. The ASM was fabricated using conventional 3 masks process based on surface micromachining technology. Driven by an electrostatic force, it is clearly observed that the ASM can control effective beam spot size. The eye pattern of the readout signal of CD proved that the jitter value is 25 ns. We have demonstrated that the ASM is potentially applicable for a compact disk (CD) compatible DVD player that has a growing popularity in the optical data storage market.