A 0.45–1V fully integrated reconfigurable switched capacitor step-down DC-DC converter with high density MIM capacitor in 22nm tri-gate CMOS

A fully integrated switched capacitor voltage regulator (SCVR) with on-die high density MIM capacitor, distributed across a 14KB register file (RF) load with an area overhead of 3.6% is demonstrated in 22nm tri-gate CMOS. The all-digital, multi-conversion-mode SCVR provides a wide output voltage range of 0.45-1V from a fixed input voltage of 1.225V. It achieves 63-84% conversion efficiency and supports a maximum load current density of 0.88 A/mm².