Comparative study of a high pressure sensor with rectangular diaphragm

This paper describes a comparative study between two kinds of high pressure sensors with rectangular diaphragm structure. In order to prove results of the study, the stress distributions of the rectangular membrane structure sensors were presented in this article. The stress distribution of the piezoresistance on the membrane was analyzed by the Finite Element Method (FEM) utilizing the ANSYS software. The two kinds of rectangular membrane structure sensors were fabricated with consistent process. The results of the comparative analysis indicate that the improvements of the sensing unit structure can enhance the sensitivity of the high pressure sensor and extend the measurement range of the sensor. Meanwhile, the accuracy requirement from double-sided lithography alignment is relatively low, which could ensure the rate of yield.