Grain growth and characteristics of chlorine doped thick polycrystalline CdZnTe films

Chlorine (CI)-doped polycrystalline CdZnTe is expected to be used as photoconductor material for Flat Panel Xray detectors (FPDs) due to its high detection efficiency and environmental resistance. However, polycrystalline film causes great variability among pixels in the X-ray image of FPDs. To reduce the variability among pixels, chlorine doping methods and their effects were investigated. By combining the two methods, the addition of CdCl₂ to the source and the introduction of vapor chloroform during deposition, we were able to reduce the variability among pixels.