3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System

We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS lens scanner for deep scanning and a MEMS mirror for two-axis lateral scan. The MEMS lens scanner can move an objective lens axially by 515 μm at only 3.2 V. The two-dimensional MEMS mirror can achieve ± 20° optical scan angle at 4.5 V. Two-dimensional and three-dimensional confocal reflectance images of microparticles embedded in PDMS and acute rat brain tissue are obtained. The axial and lateral resolutions are measured as 9.0 and 1.2 μm, respectively.