An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators

In this paper, a solid mounted FBAR working at 2.0 GHz was fabricated, which was intended for high sensitive molecular sensing. To measure the devices conveniently and accurately on the board, an in-fixture measurement method based on the de-embedded technique using the fixture model and the measured S-parameters is developed with high precision to get rid of the cumbrous probe station. The fixture was modeled accurately and the results were compared with that from the probe station. Optimized approaches have been developed with small deviations, enabling some gas or biochemical tests in real time.