Dielectric less and dimple less MEMS capacitive switches: The actuation mechanism

The present paper investigates for the first time the electrical properties of dielectric less and dimple less MEMS capacitive switches. The capacitance of these devices increases rapidly beyond pull-in being proportional to the Fowler-Nordhein current-voltage relation. The study is carried out through experimentally obtained capacitance- and current-voltage characteristic that agree with the corresponding capacitance and field emission current models.