A high-voltage interface circuit for MEMS vibratory gyroscope

In this paper, a high-voltage interface circuit has been designed and implemented for MEMS gyroscope. Continuous-time charge sensitive amplifier with chopping stabilization technique is used in the conversion stage to achieve low noise performance. A closed driving loop for MEMS gyroscope which applying multiple supply voltages is presented. The chip is fabricated in a 0.35um 5V/12V high-voltage process. The test of the chip is performed with a MEMS vibratory gyroscope. The result shows that the driving output of the ASIC can ensure a stable oscillation in the driving axis.