MEMS-based hemispherical resonator gyroscopes

This paper introduces a fabrication technique that uses planar MEMS micromachining processes to produce hemispherical resonating shells for gyroscopes. The hemispheres exhibit a quality factor in excess of 20,000 with resonant frequencies in the range of 20 kHz for the 4-node wineglass mode. The fabrication process enables production of almost perfect hemispheres (less than 1% asphericity near the pedestal) with an average surface roughness of 5nm. The high degree of sphericity contains the relative frequency mismatch Δf/f between the two degenerate modes to 0.02%. Simplicity of the fabrication process and the successful testing of the drive/sense mechanism in the resonator make it a good candidate for use as gyroscopes.