A novel magnetic-catalytic CMOS MEMS compatible gas sensor with ultra low power consumption

Beyond the conventional chemical sensors with heating power, we proposed a total new magnetic-catalytic sensing mechanism without heating which includes the original sensing material and also magnetic-catalytic with even higher sensitivity than before. A magnetic material in sol-gel method and a prepared solution of sol-gel SnO₂ is mixed at SnO₂ : Fe₃O₄ = 3 : 1. The samples with several pH conditions were under test and verified inside a CO gas chamber with solenoidal coils. The sensitivity of proposed monoxide sensor reaches 0.3416%/ppm under 18.2 Gauss without heating which shows applicable for an ultra low power CO sensor with high sensitivity.