Analysis of aerodynamics and charging of nanoparticles in the gas aggregation source based on a planar magnetron

Summary form only given. A single stage gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) was designed and characterized¹. Such source produces a beam of neutral, positively and negatively charged particles, that are dragged by a buffer gas expanding from the aggregation chamber. In this work, sizes, speeds and charges of nanoparticles have been studied.