Real time in situ electron spin resonance (ESR) study of surface reactoin on polymer interacted with plasma

Summary form only given. A comprehensive understanding of interaction between plasmas and soft-materials is essential for advanced plasma processing technology. Simultaneous measurements of signals arisen form both the gas-phase species and the surface dangling bonds, and kinetics analysis of radical formation was performed using in situ real-time electron spin resonance (ESR). Chemical reactions under plasma are very complicated, due to the simultaneous irradiation of electrons, ions, radicals, and photons. Therefore, the individual contributions of each of these reactive species in the plasma must be elucidated.