Investigation of discharge uniformity in helium dielectric barrier discharge jets

Summary form only given. This study investigated the discharge uniformity in helium dielectric barrier discharge jets (DBD jets) with various operation parameters. The significant reduction of the discharge uniformity was found to be induced by various operation modes in the DBD jets, in which concentrated plasma channels with relatively high intensity are created. This may lead to non-uniform treatment if the DBD jets are used as surface processing tools. It has been shown that the applied voltage, tube dimension, driving frequency, and helium flow rate significantly influence the plasma channel formation.¹ However; few reports have presented detailed studies on the plasma propagation and the formation of the plasma channels.