A novel electrostatic servo capacitive vacuum sensor

A novel electrostatic servo capacitive vacuum sensor has been successfully fabricated using p/sup ++/ silicon etch-stop and vacuum anodic bonding techniques. In order to maintain the reference cavity in high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure response of the sensor is good. The servo voltage vs pressure is measured and theoretical data agrees with the experimental results.