Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application

In this paper for the first time a modular built dynamic microsystem consisting of a combination of two separately fully functional fluidic devices fabricated by the LIGA-technique is presented. One of the two devices is a fluidic micro-oscillator, which needs only one fluid supply to generate an oscillating fluid jet at its two output ports. The other device is a linear actuator in which the fluidic energy is transformed into mechanical energy via a double acting piston placed in a linear actuator housing. Together the two devices form a dynamic microsystem which can be used in medical application.