Millimeter-wave Ultra-Wide-Band antenna array integrated on silicon with BCB membranes

The design and fabrication of an Ultra-Wide-Band (UWB) millimeter-wave stacked-patch antenna is presented. The antenna is fabricated on silicon and takes advantage of cavity etching and BCB membranes to achieve high efficiency (>90%), large bandwidth (30% around 57 GHz) and high gain (6–8 dBi) performances in a small area (7 mm²). The feasibility of antenna arrays is also investigated.